Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447373 | Chemical mechanical polishing slurries for metal | Craig Lack, Qianqiu (Christine) Ye, Vikas Sachan, Terence M. Thomas, Peter A. Burke | 2002-09-10 |
| 6419553 | Methods for break-in and conditioning a fixed abrasive polishing pad | Vilas Koinkar, Reza Golzarian, Matthew VanHanehem, James Shen, Peter A. Burke | 2002-07-16 |