Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475069 | Control of removal rates in CMP | Terence M. Thomas, Joseph So, Peter A. Burke | 2002-11-05 |
| 6447373 | Chemical mechanical polishing slurries for metal | Craig Lack, Qiuliang Luo, Vikas Sachan, Terence M. Thomas, Peter A. Burke | 2002-09-10 |