Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447373 | Chemical mechanical polishing slurries for metal | Qiuliang Luo, Qianqiu (Christine) Ye, Vikas Sachan, Terence M. Thomas, Peter A. Burke | 2002-09-10 |
| 6379406 | Polishing compositions for semiconductor substrates | Terence M. Thomas, Steven P. Goehringer | 2002-04-30 |