Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443812 | Compositions for insulator and metal CMP and methods relating thereto | Wesley D. Costas | 2002-09-03 |
| 6419553 | Methods for break-in and conditioning a fixed abrasive polishing pad | Vilas Koinkar, Reza Golzarian, Matthew VanHanehem, Qiuliang Luo, Peter A. Burke | 2002-07-16 |