Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6419553 | Methods for break-in and conditioning a fixed abrasive polishing pad | Vilas Koinkar, Matthew VanHanehem, Qiuliang Luo, James Shen, Peter A. Burke | 2002-07-16 |
| 6406641 | Liquid etch endpoint detection and process metrology | — | 2002-06-18 |