Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498803 | Narrow band excimer or molecular fluorine laser with adjustable bandwidth | Peter Heist | 2002-12-24 |
| 6487228 | Narrow band excimer or molecular fluorine laser with adjustable bandwidth | Peter Heist | 2002-11-26 |
| 6477187 | F2-laser with line selection | Peter Heist, Frank Voss, Andreas Görtler | 2002-11-05 |
| 6466598 | F2-laser with line selection | Peter Heist, Frank Voss, Andreas Görtler | 2002-10-15 |
| 6459720 | Excimer laser | Peter Heist, Frank Voss, Andreas Görtler | 2002-10-01 |
| 6404795 | Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines | Uwe Leinhos, Wolfgang Zschocke, Uwe Stamm | 2002-06-11 |
| 6349583 | Method and device for forming a hollow metallic workpiece by inner pressure | Dieter Topker, Elmar Grussmann | 2002-02-26 |
| 6345065 | F2-laser with line selection | Peter Heist, Frank Voss, Andreas Görtler | 2002-02-05 |