Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495795 | Device for flushing the optical path of a UV laser beam | Andreas Haupt | 2002-12-17 |
| 6477187 | F2-laser with line selection | Jürgen Kleinschmidt, Peter Heist, Frank Voss | 2002-11-05 |
| 6466598 | F2-laser with line selection | Jürgen Kleinschmidt, Peter Heist, Frank Voss | 2002-10-15 |
| 6459720 | Excimer laser | Jürgen Kleinschmidt, Peter Heist, Frank Voss | 2002-10-01 |
| 6399916 | Apparatus for purging the beam path of a UV laser beam | Andreas Haupt | 2002-06-04 |
| 6345065 | F2-laser with line selection | Jürgen Kleinschmidt, Peter Heist, Frank Voss | 2002-02-05 |