Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498803 | Narrow band excimer or molecular fluorine laser with adjustable bandwidth | Jürgen Kleinschmidt | 2002-12-24 |
| 6487228 | Narrow band excimer or molecular fluorine laser with adjustable bandwidth | Jürgen Kleinschmidt | 2002-11-26 |
| 6476987 | Excimer laser with line narrowing | Juergen Kleinschmidt, Matthias Kramer | 2002-11-05 |
| 6477187 | F2-laser with line selection | Jürgen Kleinschmidt, Frank Voss, Andreas Görtler | 2002-11-05 |
| 6466598 | F2-laser with line selection | Jürgen Kleinschmidt, Frank Voss, Andreas Görtler | 2002-10-15 |
| 6459720 | Excimer laser | Jürgen Kleinschmidt, Frank Voss, Andreas Görtler | 2002-10-01 |
| 6404796 | Laser resonator for improving narrow band emission of an excimer laser | Hans-Stephan Albrecht, Klaus Wolfgang Volger | 2002-06-11 |
| 6345065 | F2-laser with line selection | Jürgen Kleinschmidt, Frank Voss, Andreas Görtler | 2002-02-05 |