Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493370 | Laser gas replenishment method | Klaus Vogler, Thomas Schroeder | 2002-12-10 |
| 6490308 | Laser gas replenishment method | Klaus Vogler, Thomas Schroeder | 2002-12-03 |
| 6404796 | Laser resonator for improving narrow band emission of an excimer laser | Peter Heist, Klaus Wolfgang Volger | 2002-06-11 |
| 6389048 | Detector with frequency converting coating | Uwe Stamm, Uwe Leinhos, Wolfgang Zschocke | 2002-05-14 |
| 6389052 | Laser gas replenishment method | Klaus Vogler, Thomas Schroeder | 2002-05-14 |