Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493370 | Laser gas replenishment method | Hans-Stephan Albrecht, Thomas Schroeder | 2002-12-10 |
| 6490305 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Frank Voss, Rainer Patzel | 2002-12-03 |
| 6490307 | Method and procedure to automatically stabilize excimer laser output parameters | Bruno Becker de Mos, Uwe Stamm | 2002-12-03 |
| 6490308 | Laser gas replenishment method | Hans-Stephan Albrecht, Thomas Schroeder | 2002-12-03 |
| 6487229 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Frank Voss, Rainer Patzel | 2002-11-26 |
| 6389052 | Laser gas replenishment method | Hans-Stephan Albrecht, Thomas Schroeder | 2002-05-14 |