Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490306 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Uwe Stamm | 2002-12-03 |
| 6490305 | Beam delivery system for molecular fluorine (F2) laser | Klaus Vogler, Frank Voss, Rainer Patzel | 2002-12-03 |
| 6487229 | Beam delivery system for molecular fluorine (F2) laser | Klaus Vogler, Frank Voss, Rainer Patzel | 2002-11-26 |
| 6477192 | Device for on-line control of output power of vacuum-UV laser | Gongxue Hua | 2002-11-05 |
| 6463084 | Device for on-line control of output power of vacuum-UV laser | Gongxue Hua | 2002-10-08 |
| 6463086 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Uwe Stamm | 2002-10-08 |
| 6442182 | Device for on-line control of output power of vacuum-UV laser | Gongxue Hua | 2002-08-27 |
| 6426966 | Molecular fluorine (F2) laser with narrow spectral linewidth | Dirk Basting, Uwe Stamm | 2002-07-30 |
| 6393037 | Wavelength selector for laser with adjustable angular dispersion | Dirk Basting | 2002-05-21 |
| 6393040 | Molecular fluorine (F2) excimer laser with reduced coherence length | Uwe Stamm | 2002-05-21 |
| 6381256 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Uwe Stamm | 2002-04-30 |