Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6477192 | Device for on-line control of output power of vacuum-UV laser | Sergei V. Govorkov | 2002-11-05 |
| 6463084 | Device for on-line control of output power of vacuum-UV laser | Sergei V. Govorkov | 2002-10-08 |
| 6442182 | Device for on-line control of output power of vacuum-UV laser | Sergei V. Govorkov | 2002-08-27 |