Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490305 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Klaus Vogler, Rainer Patzel | 2002-12-03 |
| 6487229 | Beam delivery system for molecular fluorine (F2) laser | Sergei V. Govorkov, Klaus Vogler, Rainer Patzel | 2002-11-26 |
| 6477187 | F2-laser with line selection | Jürgen Kleinschmidt, Peter Heist, Andreas Görtler | 2002-11-05 |
| 6466598 | F2-laser with line selection | Jürgen Kleinschmidt, Peter Heist, Andreas Görtler | 2002-10-15 |
| 6459720 | Excimer laser | Jürgen Kleinschmidt, Peter Heist, Andreas Görtler | 2002-10-01 |
| 6345065 | F2-laser with line selection | Jürgen Kleinschmidt, Peter Heist, Andreas Görtler | 2002-02-05 |