Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6404795 | Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines | Uwe Leinhos, Jürgen Kleinschmidt, Uwe Stamm | 2002-06-11 |
| 6389048 | Detector with frequency converting coating | Uwe Stamm, Hans-Stephan Albrecht, Uwe Leinhos | 2002-05-14 |