Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6404795 | Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines | Jürgen Kleinschmidt, Wolfgang Zschocke, Uwe Stamm | 2002-06-11 |
| 6389045 | Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasers | Klaus Mann, Thomas Schroder, Bernd Schafer, Uwe Stamm | 2002-05-14 |
| 6389048 | Detector with frequency converting coating | Uwe Stamm, Hans-Stephan Albrecht, Wolfgang Zschocke | 2002-05-14 |