Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476987 | Excimer laser with line narrowing | Peter Heist, Matthias Kramer | 2002-11-05 |
| 6421365 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Peter Lokai | 2002-07-16 |