Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451499 | Polycyclic resist compositions with increased etch resistance | Saikumar Jayaraman, Brian L. Goodall, Larry F. Rhodes, Robert A. Shick, Richard Vicari +3 more | 2002-09-17 |
| 6451945 | Modified polycyclic polymers | Saikumar Jayaraman, George M. Benedikt, Larry F. Rhodes, Richard Vicari, Robert David Allen +2 more | 2002-09-17 |
| 6444408 | High silicon content monomers and polymers suitable for 193 nm bilayer resists | Phillip Brock, Richard Anthony DiPietro, Donald C. Hofer, Gregory Michael Wallraff | 2002-09-03 |
| 6420503 | Norbornene sulfonamide polymers | Saikumar Jayaraman, Richard Vicari, Larry F. Rhodes, Pushkara R. Varanasi, Thomas I. Wallow +4 more | 2002-07-16 |
| 6340734 | Silsesquioxane polymers, method of synthesis, photoresist composition, and multilayer lithographic method | Qinghuang Lin, Marie Angelopoulos, Ahmad D. Katnani | 2002-01-22 |