Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6344305 | Radiation sensitive silicon-containing resists | Ahmad D. Katnani, Douglas Charles LaTulipe, David E. Seeger, William R. Brunsvold, Ali Afzali-Ardakani | 2002-02-05 |
| 6340734 | Silsesquioxane polymers, method of synthesis, photoresist composition, and multilayer lithographic method | Marie Angelopoulos, Ahmad D. Katnani, Ratnam Sooriyakumaran | 2002-01-22 |