Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444408 | High silicon content monomers and polymers suitable for 193 nm bilayer resists | Richard Anthony DiPietro, Donald C. Hofer, Ratnam Sooriyakumaran, Gregory Michael Wallraff | 2002-09-03 |