Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451945 | Modified polycyclic polymers | Saikumar Jayaraman, George M. Benedikt, Larry F. Rhodes, Richard Vicari, Robert David Allen +2 more | 2002-09-17 |
| 6444408 | High silicon content monomers and polymers suitable for 193 nm bilayer resists | Phillip Brock, Donald C. Hofer, Ratnam Sooriyakumaran, Gregory Michael Wallraff | 2002-09-03 |
| 6420503 | Norbornene sulfonamide polymers | Saikumar Jayaraman, Richard Vicari, Larry F. Rhodes, Pushkara R. Varanasi, Thomas I. Wallow +4 more | 2002-07-16 |