Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420503 | Norbornene sulfonamide polymers | Saikumar Jayaraman, Richard Vicari, Larry F. Rhodes, Thomas I. Wallow, Ratnam Sooriyakumaran +4 more | 2002-07-16 |
| 6391521 | Resist compositions containing bulky anhydride additives | Hiroshi Ito | 2002-05-21 |
| 6372406 | Deactivated aromatic amines as additives in acid-catalyzed resists | William R. Brunsvold, Ahmad D. Katnani | 2002-04-16 |