Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475875 | Shallow trench isolation elevation uniformity via insertion of a polysilicon etch layer | Pang Chong Hau, Alex See, Peter Hing | 2002-11-05 |
| 6436833 | Method for pre-STI-CMP planarization using poly-si thermal oxidation | Chong Hau Pang, Alex See, Peter Hing | 2002-08-20 |
| 6403484 | Method to achieve STI planarization | Victor Lim, Lap Chan, James Yong Meng Lee, Wang Ling Goh | 2002-06-11 |