Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475875 | Shallow trench isolation elevation uniformity via insertion of a polysilicon etch layer | Chen Feng, Alex See, Peter Hing | 2002-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475875 | Shallow trench isolation elevation uniformity via insertion of a polysilicon etch layer | Chen Feng, Alex See, Peter Hing | 2002-11-05 |