Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475875 | Shallow trench isolation elevation uniformity via insertion of a polysilicon etch layer | Pang Chong Hau, Chen Feng, Alex See | 2002-11-05 |
| 6436833 | Method for pre-STI-CMP planarization using poly-si thermal oxidation | Chong Hau Pang, Chen Feng, Alex See | 2002-08-20 |