Issued Patents 2002
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495875 | Method of forming metal oxide metal capacitors using multi-step rapid material thermal process and a device formed thereby | Siddhartha Bhowmik, Sailesh Mansinh Merchant, Sidhartha Sen | 2002-12-17 |
| 6492712 | High quality oxide for use in integrated circuits | Yuanning Chen, Sundar Srinivasan Chetlur, Sailesh Mansinh Merchant | 2002-12-10 |
| 6471925 | Method for treating an effluent gas during semiconductor processing | Sailesh Mansinh Merchant, Sudhanshu Misra | 2002-10-29 |
| 6461225 | Local area alloying for preventing dishing of copper during chemical-mechanical polishing (CMP) | Sudhanshu Misra | 2002-10-08 |
| 6458289 | CMP slurry for polishing semiconductor wafers and related methods | Sailesh Mansinh Merchant, Sudhanshu Misra | 2002-10-01 |
| 6458016 | Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method | Sailesh Mansinh Merchant, Sudhanshu Misra, Hem M. Vaidya | 2002-10-01 |
| 6440849 | Microstructure control of copper interconnects | Sailesh Mansinh Merchant | 2002-08-27 |
| 6440829 | N-profile engineering at the poly/gate oxide and gate oxide/SI interfaces through NH3 annealing of a layered poly/amorphous-silicon structure | Yi Ma, Michael Laughery | 2002-08-27 |
| 6439972 | Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method | Sudhanshu Misra, Sundar Chetlur, Vivek Saxena | 2002-08-27 |
| 6436830 | CMP system for polishing semiconductor wafers and related method | Sailesh Mansinh Merchant, Sudhanshu Misra | 2002-08-20 |
| 6417570 | Layered dielectric film structure suitable for gate dielectric application in sub-0.25 &mgr;m technologies | Yi Ma | 2002-07-09 |
| 6410986 | Multi-layered titanium nitride barrier structure | Sailesh Mansinh Merchant | 2002-06-25 |
| 6410419 | Silicon carbide barrier layers for porous low dielectric constant materials | Sailesh Mansinh Merchant, Sudhanshu Misra | 2002-06-25 |
| 6403415 | Semiconductor device having a metal barrier layer for a dielectric material having a high dielectric constant and a method of manufacture thereof | Glenn B. Alers, Sailesh Mansinh Merchant | 2002-06-11 |
| 6391668 | Method of determining a trap density of a semiconductor/oxide interface by a contactless charge technique | Carlos M. Chacon, Sundar Chetlur, Brian E. Harding, Minesh Patel | 2002-05-21 |
| 6387772 | Method for forming trench capacitors in SOI substrates | Sailesh Chittipeddi, Charles Walter Pearce | 2002-05-14 |
| 6380606 | Locos isolation process using a layered pad nitride and dry field oxidation stack and semiconductor device employing the same | David C. Brady, Isik C. Kizilyalli, Hem M. Vaidya | 2002-04-30 |
| 6375541 | Polishing fluid polishing method semiconductor device and semiconductor device fabrication method | Sailesh Mansinh Merchant, Sudhanshu Misra, Hem M. Vaidya | 2002-04-23 |
| 6368200 | Polishing pads from closed-cell elastomer foam | Sailesh Mansinh Merchant, Sudhanshu Misra | 2002-04-09 |
| 6364744 | CMP system and slurry for polishing semiconductor wafers and related method | Sailesh Mansinh Merchant, Sudhanshu Misra | 2002-04-02 |
| 6359339 | Multi-layered metal silicide resistor for Si Ic's | Richard W. Gregor, Isik C. Kizilyalli, Sailesh Mansinh Merchant, Jaseph R. Radosevich | 2002-03-19 |
| 6358790 | Method of making a capacitor | Larry Bruce Fritzinger, Nace Layadi, Sailesh Mansinh Merchant | 2002-03-19 |
| 6340827 | Diffusion barrier for use with high dielectric constant materials and electronic devices incorporating same | Seungmoo Choi, Sailesh Mansinh Merchant | 2002-01-22 |
| 6339246 | Tungsten silicide nitride as an electrode for tantalum pentoxide devices | Isik C. Kizilyalli, Sailesh Mansinh Merchant | 2002-01-15 |