Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472307 | Methods for improved encapsulation of thick metal features in integrated circuit fabrication | Donald C. Dennis, Simon John Molloy, Kurt G. Steiner, Sylvia Thomas | 2002-10-29 |
| 6458648 | Method for in-situ removal of side walls in MOM capacitor formation | Simon John Molloy, Edward B. Harris, Sidhartha Sen | 2002-10-01 |
| 6436829 | Two phase chemical/mechanical polishing process for tungsten layers | Arun K. Nanda | 2002-08-20 |
| 6406999 | Semiconductor device having reduced line width variations between tightly spaced and isolated features | Thomas Craig Esry, Sylvia Marci Luque, Simon John Molloy, Mario Pita | 2002-06-18 |
| 6395639 | Process for improving line width variations between tightly spaced and isolated features in integrated circuits | Thomas Craig Esry, Sylvia Marci Luque, Simon John Molloy, Mario Pita | 2002-05-28 |
| 6358790 | Method of making a capacitor | Larry Bruce Fritzinger, Sailesh Mansinh Merchant, Pradip K. Roy | 2002-03-19 |