Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472307 | Methods for improved encapsulation of thick metal features in integrated circuit fabrication | Donald C. Dennis, Nace Layadi, Kurt G. Steiner, Sylvia Thomas | 2002-10-29 |
| 6458648 | Method for in-situ removal of side walls in MOM capacitor formation | Nace Layadi, Edward B. Harris, Sidhartha Sen | 2002-10-01 |
| 6406999 | Semiconductor device having reduced line width variations between tightly spaced and isolated features | Thomas Craig Esry, Nace Layadi, Sylvia Marci Luque, Mario Pita | 2002-06-18 |
| 6395639 | Process for improving line width variations between tightly spaced and isolated features in integrated circuits | Thomas Craig Esry, Nace Layadi, Sylvia Marci Luque, Mario Pita | 2002-05-28 |
| 6384446 | Grooved capacitor structure for integrated circuits | Kuo-Hua Lee, Daniel J. Vitkavage | 2002-05-07 |