Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500729 | Method for reducing dishing related issues during the formation of shallow trench isolation structures | Sailesh Chittipeddi, Ankineedu Velaga | 2002-12-31 |
| 6436829 | Two phase chemical/mechanical polishing process for tungsten layers | Nace Layadi | 2002-08-20 |
| 6358785 | Method for forming shallow trench isolation structures | Sailesh Chittipeddi, Ankineedu Velaga | 2002-03-19 |