Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471925 | Method for treating an effluent gas during semiconductor processing | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-10-29 |
| 6461225 | Local area alloying for preventing dishing of copper during chemical-mechanical polishing (CMP) | Pradip K. Roy | 2002-10-08 |
| 6458016 | Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method | Sailesh Mansinh Merchant, Pradip K. Roy, Hem M. Vaidya | 2002-10-01 |
| 6458289 | CMP slurry for polishing semiconductor wafers and related methods | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-10-01 |
| 6439972 | Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method | Pradip K. Roy, Sundar Chetlur, Vivek Saxena | 2002-08-27 |
| 6436830 | CMP system for polishing semiconductor wafers and related method | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-08-20 |
| 6436807 | Method for making an interconnect layer and a semiconductor device including the same | Donald Thomas Cwynar, Dennis Okumu Ouma, Vivek Saxena, John Sharpe | 2002-08-20 |
| 6410419 | Silicon carbide barrier layers for porous low dielectric constant materials | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-06-25 |
| 6375541 | Polishing fluid polishing method semiconductor device and semiconductor device fabrication method | Sailesh Mansinh Merchant, Pradip K. Roy, Hem M. Vaidya | 2002-04-23 |
| 6368200 | Polishing pads from closed-cell elastomer foam | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-04-09 |
| 6364744 | CMP system and slurry for polishing semiconductor wafers and related method | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-04-02 |