Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475842 | Process for gate oxide side-wall protection from plasma damage to form highly reliable gate dielectrics | Kean Syn Cheah, Hooi Peng Low | 2002-11-05 |
| 6451660 | Method of forming bipolar transistors comprising a native oxide layer formed on a substrate by rinsing the substrate in ozonated water | Yih-Feng Chyan, Chung Wai Leung, Jane Qian Liu, Timothy Campbell | 2002-09-17 |
| 6440829 | N-profile engineering at the poly/gate oxide and gate oxide/SI interfaces through NH3 annealing of a layered poly/amorphous-silicon structure | Pradip K. Roy, Michael Laughery | 2002-08-27 |
| 6417570 | Layered dielectric film structure suitable for gate dielectric application in sub-0.25 &mgr;m technologies | Pradip K. Roy | 2002-07-09 |