Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475842 | Process for gate oxide side-wall protection from plasma damage to form highly reliable gate dielectrics | Hooi Peng Low, Yi Ma | 2002-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475842 | Process for gate oxide side-wall protection from plasma damage to form highly reliable gate dielectrics | Hooi Peng Low, Yi Ma | 2002-11-05 |