Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500499 | Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors | Yoshihide Senzaki, Arthur Kenneth Hochberg, David A. Roberts, John Anthony Thomas Norman, Robert McLemore Fleming | 2002-12-31 |
| 6403415 | Semiconductor device having a metal barrier layer for a dielectric material having a high dielectric constant and a method of manufacture thereof | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-06-11 |