Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492258 | METHOD FOR REDUCING STRESS-INDUCED VOIDS FOR 0.25-&mgr;M AND SMALLER SEMICONDUCTOR CHIP TECHNOLOGY BY ANNEALING INTERCONNECT LINES AND USING LOW BIAS VOLTAGE AND LOW INTERLAYER DIELECTRIC DEPOSITION RATE AND SEMICONDUCTOR CHIP MADE THEREBY | Minh Van Ngo, Paul R. Besser, Matthew S. Buynoski, John Caffall, Nick Maccrae +1 more | 2002-12-10 |
| 6472751 | H2 diffusion barrier formation by nitrogen incorporation in oxide layer | Robert Chen, Jeffrey A. Shields, Robert Dawson | 2002-10-29 |
| 6351013 | Low-K sub spacer pocket formation for gate capacitance reduction | Scott Luning, David Wu | 2002-02-26 |