Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482726 | Control trimming of hard mask for sub-100 nanometer transistor gate | Massud Aminpur, Scott Luning | 2002-11-19 |
| 6458678 | Transistor formed using a dual metal process for gate and source/drain region | Thomas E. Spikes, Jr., Frederick N. Hause | 2002-10-01 |
| 6391751 | Method for forming vertical profile of polysilicon gate electrodes | William R. Roche, Scott Luning, Karen L. E. Turnqest | 2002-05-21 |
| 6368926 | Method of forming a semiconductor device with source/drain regions having a deep vertical junction | — | 2002-04-09 |
| 6351013 | Low-K sub spacer pocket formation for gate capacitance reduction | Scott Luning, Khanh Tran | 2002-02-26 |