Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693382 | Frame-supported pellicle for dustproof protection of photomask in photolithography | Yuichi Hamada, Satoshi Kawakami, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida | 1997-12-02 |
| 5691088 | Pellicle for protection of photolithographic mask | Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Yuichi Hamada, Kimitaka Kumagae | 1997-11-25 |
| 5643483 | Ceramic heater made of fused silica glass having roughened surface | Hiroshi Mogi | 1997-07-01 |
| 5616927 | Frame-supported pellicle for dustproof protection of photomask | Satoshi Kawakami, Yuichi Hamada, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida | 1997-04-01 |
| 5607541 | Electrostatic chuck | Makoto Kawai | 1997-03-04 |
| 5597669 | Frame-supported pellicle for photolithography | Yuichi Hamada, Meguru Kashida | 1997-01-28 |