Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693382 | Frame-supported pellicle for dustproof protection of photomask in photolithography | Yuichi Hamada, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1997-12-02 |
| 5616927 | Frame-supported pellicle for dustproof protection of photomask | Yoshihiro Kubota, Yuichi Hamada, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida | 1997-04-01 |