Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693382 | Frame-supported pellicle for dustproof protection of photomask in photolithography | Yuichi Hamada, Satoshi Kawakami, Toru Shirasaki, Meguru Kashida, Yoshihiro Kubota | 1997-12-02 |
| 5691088 | Pellicle for protection of photolithographic mask | Yoshihiro Kubota, Meguru Kashida, Hitoshi Noguchi, Yuichi Hamada, Kimitaka Kumagae | 1997-11-25 |
| 5616927 | Frame-supported pellicle for dustproof protection of photomask | Yoshihiro Kubota, Satoshi Kawakami, Yuichi Hamada, Toru Shirasaki, Meguru Kashida | 1997-04-01 |