Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693382 | Frame-supported pellicle for dustproof protection of photomask in photolithography | Satoshi Kawakami, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1997-12-02 |
| 5691088 | Pellicle for protection of photolithographic mask | Yoshihiro Kubota, Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Kimitaka Kumagae | 1997-11-25 |
| 5616927 | Frame-supported pellicle for dustproof protection of photomask | Yoshihiro Kubota, Satoshi Kawakami, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida | 1997-04-01 |
| 5597669 | Frame-supported pellicle for photolithography | Meguru Kashida, Yoshihiro Kubota | 1997-01-28 |