Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691088 | Pellicle for protection of photolithographic mask | Yoshihiro Kubota, Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Yuichi Hamada | 1997-11-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691088 | Pellicle for protection of photolithographic mask | Yoshihiro Kubota, Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Yuichi Hamada | 1997-11-25 |