Makoto Kawai

SC Shin-Etsu Chemical Co.: 1 patents #80 of 182Top 45%

📍 Osaka, JP: #38 of 80 inventorsTop 50%

Overall (1997): #109,621 of 185,788Top 60%

Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
5607541	Electrostatic chuck	Yoshihiro Kubota	1997-03-04