Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691112 | Sulfonium salt and chemically amplified positive resist composition | Satoshi Watanabe, Youichi Ohsawa, Kazumasa Maruyama, Yoshihumi Takeda, Junji Shimada +2 more | 1997-11-25 |
| 5691396 | Polysiloxane compounds and positive resist compositions | Katsuya Takemura, Junji Tsuchiya, Osamu Watanabe | 1997-11-25 |
| 5633409 | Tristertbutoxyphenyl sulfonium tosylate compound | Satoshi Watanabe, Youichi Ohsawa, Kazumasa Maruyama, Yoshihumi Takeda, Junji Shimada +2 more | 1997-05-27 |
| 5629134 | Chemically amplified positive resist composition | Katsuyuki Oikawa, Fujio Yagihashi, Akinobu Tanaka, Yoshio Kawai, Jiro Nakamura | 1997-05-13 |
| 5624787 | Chemically amplified positive resist composition | Satoshi Watanabe, Katsuyuki Oikawa, Akinobu Tanaka, Tadahito Matsuda, Yoshio Kawai | 1997-04-29 |
| 5612170 | Positive resist composition | Katsuya Takemura, Junji Tsuchiya, Akinobu Tanaka, Yoshio Kawai, Jiro Nakamura | 1997-03-18 |