| 5679496 |
Chemically amplified positive resist composition |
Youichi Ohsawa, Satoshi Watanabe, Katsuyuki Oikawa, Akinobu Tanaka, Jiro Nakamura |
1997-10-21 |
| 5670503 |
Pyrazole derivatives |
Hitoshi Yamazaki, Hirokazu Tanaka, Teruo Oku |
1997-09-23 |
| 5663365 |
Process for the preparation of pyrazolones |
Yasuo Yamamoto, Naoki Shirakawa, Shinichi Takano |
1997-09-02 |
| 5636004 |
Projection exposure method and apparatus |
Akihiro Ootaka, Tadahito Matsuda |
1997-06-03 |
| 5629134 |
Chemically amplified positive resist composition |
Katsuyuki Oikawa, Toshinobu Ishihara, Fujio Yagihashi, Akinobu Tanaka, Jiro Nakamura |
1997-05-13 |
| 5624931 |
Pyrazole derivatives |
Teruo Oku, Hiroshi Marusawa, Hitoshi Yamazaki, Yoshito Abe |
1997-04-29 |
| 5624787 |
Chemically amplified positive resist composition |
Satoshi Watanabe, Katsuyuki Oikawa, Toshinobu Ishihara, Akinobu Tanaka, Tadahito Matsuda |
1997-04-29 |
| 5612170 |
Positive resist composition |
Katsuya Takemura, Junji Tsuchiya, Toshinobu Ishihara, Akinobu Tanaka, Jiro Nakamura |
1997-03-18 |