Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679496 | Chemically amplified positive resist composition | Youichi Ohsawa, Satoshi Watanabe, Katsuyuki Oikawa, Yoshio Kawai, Jiro Nakamura | 1997-10-21 |
| 5629134 | Chemically amplified positive resist composition | Katsuyuki Oikawa, Toshinobu Ishihara, Fujio Yagihashi, Yoshio Kawai, Jiro Nakamura | 1997-05-13 |
| 5624787 | Chemically amplified positive resist composition | Satoshi Watanabe, Katsuyuki Oikawa, Toshinobu Ishihara, Tadahito Matsuda, Yoshio Kawai | 1997-04-29 |
| 5612170 | Positive resist composition | Katsuya Takemura, Junji Tsuchiya, Toshinobu Ishihara, Yoshio Kawai, Jiro Nakamura | 1997-03-18 |