Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5636004 | Projection exposure method and apparatus | Akihiro Ootaka, Yoshio Kawai | 1997-06-03 |
| 5624787 | Chemically amplified positive resist composition | Satoshi Watanabe, Katsuyuki Oikawa, Toshinobu Ishihara, Akinobu Tanaka, Yoshio Kawai | 1997-04-29 |