Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691112 | Sulfonium salt and chemically amplified positive resist composition | Satoshi Watanabe, Youichi Ohsawa, Toshinobu Ishihara, Kazumasa Maruyama, Yoshihumi Takeda +2 more | 1997-11-25 |
| 5691396 | Polysiloxane compounds and positive resist compositions | Junji Tsuchiya, Osamu Watanabe, Toshinobu Ishihara | 1997-11-25 |
| 5633409 | Tristertbutoxyphenyl sulfonium tosylate compound | Satoshi Watanabe, Youichi Ohsawa, Toshinobu Ishihara, Kazumasa Maruyama, Yoshihumi Takeda +2 more | 1997-05-27 |
| 5612170 | Positive resist composition | Junji Tsuchiya, Toshinobu Ishihara, Akinobu Tanaka, Yoshio Kawai, Jiro Nakamura | 1997-03-18 |