Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5691112 | Sulfonium salt and chemically amplified positive resist composition | Satoshi Watanabe, Youichi Ohsawa, Toshinobu Ishihara, Kazumasa Maruyama, Junji Shimada +2 more | 1997-11-25 |
| 5633409 | Tristertbutoxyphenyl sulfonium tosylate compound | Satoshi Watanabe, Youichi Ohsawa, Toshinobu Ishihara, Kazumasa Maruyama, Junji Shimada +2 more | 1997-05-27 |