Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5640227 | Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern | Kinya Kato, Kazuaki Saiki, Masaki Kato | 1997-06-17 |
| 5625436 | Scanning type exposure apparatus and exposure method | Masamitsu Yanagihara, Susumu Mori, Tsuyoshi Naraki, Seiji Miyazaki, Tsuyoshi Narabe +1 more | 1997-04-29 |
| 5614988 | Projection exposure apparatus and method with a plurality of projection optical units | Kinya Kato | 1997-03-25 |
| 5602620 | Scanning exposure apparatus and exposure method | Seiji Miyazaki, Kei Nara, Masamitsu Yanagihara | 1997-02-11 |