Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658795 | Method for biodegradation of polluting substance | Kazumi Tanaka, Masanori Sakuranaga, Shinya Kozaki | 1997-08-19 |
| 5640227 | Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern | Kazuaki Saiki, Masami Seki, Masaki Kato | 1997-06-17 |
| 5614988 | Projection exposure apparatus and method with a plurality of projection optical units | Masami Seki | 1997-03-25 |