Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5657130 | Exposure apparatus and method | Hiroshi Shirasu, Seiji Miyazaki, Susumu Mori | 1997-08-12 |
| 5640227 | Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern | Kinya Kato, Masami Seki, Masaki Kato | 1997-06-17 |