Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684595 | Alignment apparatus and exposure apparatus equipped therewith | Hideo Mizutani, Masashi Tanaka | 1997-11-04 |
| 5640227 | Exposure apparatus and exposure method for minimizing defocusing of the transferred pattern | Kinya Kato, Kazuaki Saiki, Masami Seki | 1997-06-17 |